The Correlative Measurements Software “CorrMeas”
by DoubleFox GmbH Germany
The CorrMeas software revolutionizes correlative microscopy, automating data acquisition and instrument control for seamless automated and multi-microscope workflows in industry.
CorrMeas Videos
Keep the relationship between data and sample
Microscopes collect data from specific positions on a sample, and as the resolution increases, it becomes more challenging to accurately determine the exact location within the sample from which the images originate. Therefore, it is essential for all microscopic images to possess inherent position information, indicating the sample they are derived from, the specific position within the sample, and the orientation in which they were recorded.
CorrMeas performs precisely these tasks by storing the sample's shape and organizing all associated information from acquired microscope images in a correlated manner. This ensures that the sample is accurately represented, with each image positioned at its original location. Additionally, CorrMeas facilitates interactive control of the microscope, allowing for seamless navigation to previously visited locations that may have been examined by other microscopes and overlaying the newly acquired or live data with the existing images.
Correlative Work
Unleash the power of CorrMeas as it overlays diverse microscope type images, taking you on a resolution journey akin to exploring Google Maps.
CorrMeas - Correlative Measurements
CorrMeas is a software solution that provides an industrial automation environment for correlative microscopy. It is designed to streamline and automate various aspects of microscopy workflows, allowing users to work with different microscopes on a single sample, automate data acquisition, and control the instruments themselves. CorrMeas focuses on efficiently managing and correlating the acquired microscope images with the sample's position and orientation information. It also offers features such as interactive control of the microscope, storage of sample shape, and the ability to overlay new images with existing data for comparative analysis. Overall, CorrMeas aims to enhance productivity and efficiency in the field of correlative microscopy by providing advanced automation and intuitive user interfaces.
Benefits
Same coordinates on different microscopes
Achieving precise coordinate alignment between the stage and sample is crucial when working with sample coordinates. With CorrMeas, you can effortlessly establish precise coordinate systems, maximize accuracy, and unlock the full potential of your microscopy experiments.
Double View of Images
See acquired images both in original size on the sample as well as in a tabular form related to its acquisition position or defect id.
Supported Microscopes (so far)
CorrMeas currently provides interfaces for all ZEISS Scanning Electron Microscopes, the ZEISS Light Microscopes having motorized stages, and Semilab Atomic Force Microscopes based on the ScanTool Software with C32 AFM controller.
Teach workflows
CorrMeas includes a state system that allows for interactive storage and retrieval of microscope parameter sets. This feature enables teaching the instrument by recording and playing back system states, simplifying setup and enhancing programmability.
Visual Programming
Use the DoubleFox Calculator's hybrid visual and text based programming language. The hybrid programming brings together the best of both worlds: Choose from the list of available functions and connect them visually without generating syntax errors. At the same time watch the code created by connecting the visual elements.
Application examples
Critical Dimension
Automated measurements
Perform automated measurements of critical dimension on your sample. Use reference images to automatically find precisely the area of interest.
Defect Recognition
Localize and image defects found by laser scanners
Load in your KLARF file and let the system automatically find defects using spiral search and image analysis techniques.
GDSII Overlay
Use GDSII layouts for navigation
Load in your GDSII files and overlay the layout with your live image from the microscope. Find your area of interest based on the layout.
Combined Microscopy
Use data from different microscopy types
Use the specific properties of different microscope types to find your area of interest and acquire the type of data needed indepentend of your microscope type.
Further information
Industrial automation
CorrMeas is tailor-made for industrial users, seamlessly merging two essential functionalities. Firstly, it enables interactive sample navigation by utilizing positions and various types of images as navigation aids. Secondly, it empowers users to create automated workflows through its robust scripting environment. Instead of navigating through numerous dialog windows, instrument control is achieved effortlessly through concise scripts that can be selected and executed. Every CorrMeas installation includes preconfigured scripts that perfectly align with the user's specific environment. Customers have the option to further refine and expand the scripts, or they can rely on our expert assistance to optimize workflows through local or remote services. CorrMeas revolutionizes industrial microscopy, providing a streamlined and flexible solution for efficient and customized operations.
Videos and Tutorials
Visually Programming ZEISS SEMs
CorrMeas offers visual programming capabilities specifically designed for ZEISS SEMs, enhancing their functionality when used in conjunction. With the parameter finder feature, users can access a comprehensive list of ZEISS API parameters and commands, allowing for seamless integration into the visual program flow through simple drag-and-drop operations. In summary, CorrMeas empowers users to visually program ZEISS SEMs, unlocking a more intuitive and efficient workflow.
